No abstract

Planar all-dielectric photonic crystals or metasurfaces host various resonant eigenmodes including leaky guided mode resonances (GMR) and bound states in the continuum (BIC). Engineering these resonant modes can provide new opportunities for diverse applications. Particularly, electrical control of the resonances will boost development of the applications by making them tunable. Here, we experimentally demonstrate nano-electromechanical tuning of both the GMR and the quasi-BIC modes in the telecom wavelength range. With electrostatic forces induced by a few volts, the devices achieve spectral shifts over 5 nm, absolute intensity modulation over 40%, and modulation speed exceeding 10 kHz. We also show that the interference between two resonances enables the enhancement of the phase response when two modes are overlapped in spectrum. A phase shift of 144° is experimentally observed with a bias of 4 V. Our work suggests a direct route toward optical modulators through the engineering of GMRs and quasi-BIC resonances.

Modern imaging systems can be enhanced in efficiency, compactness, and application through the introduction of multilayer nanopatterned structures for manipulation of light based on its fundamental properties. High transmission multispectral imaging is elusive due to the commonplace use of filter arrays which discard most of the incident light. Further, given the challenges of miniaturizing optical systems, most cameras do not leverage the wealth of information in polarization and spatial degrees of freedom. Optical metamaterials can respond to these electromagnetic properties but have been explored primarily in single-layer geometries, limiting their performance and multifunctional capacity. Here we use advanced two-photon lithography to realize multilayer scattering structures that achieve highly nontrivial optical transformations intended to process light just before it reaches a focal plane array. Computationally optimized multispectral and polarimetric sorting devices are fabricated with submicron feature sizes and experimentally validated in the mid-infrared. A final structure shown in simulation redirects light based on its angular momentum. These devices demonstrate that with precise 3-dimensional nanopatterning, one can directly modify the scattering properties of a sensor array to create advanced imaging systems.

Spatial light modulators (SLMs) play essential roles in various free-space optical technologies, offering spatio-temporal control of amplitude, phase, or polarization of light. Beyond conventional SLMs based on liquid crystals or microelectromechanical systems, active metasurfaces are considered as promising SLM platforms because they could simultaneously provide high-speed and small pixel size. However, the active metasurfaces reported so far have achieved either limited phase modulation or low efficiency. Here, we propose nano-electromechanically tunable asymmetric dielectric metasurfaces as a platform for reflective SLMs. Exploiting the strong asymmetric radiation of perturbed high-order Mie resonances, the metasurfaces experimentally achieve a phase-shift close to 290∘, over 50% reflectivity, and a wavelength-scale pixel size. Electrical control of diffraction patterns is also achieved by displacing the Mie resonators using nano-electro-mechanical forces. This work paves the ways for future exploration of the asymmetric metasurfaces and for their application to the next-generation SLMs.

Photonic topology optimization is a technique used to find the permittivity distribution of a device that optimizes an electromagnetic figure-of-merit. Two common versions are used: continuous density-based optimizations that optimize a gray scale permittivity defined over a grid, and discrete level-set optimizations that optimize the shape of the material boundary of a device. In this work we present a method for constraining a continuous optimization such that it is guaranteed to converge to a discrete solution. This is done by inserting a constrained suboptimization with low computational overhead cost at each iteration of an overall gradient-based optimization. The technique adds only one hyperparameter with straightforward behavior to control the aggressiveness of binarization. Computational examples are provided to analyze the hyperparameter behavior, show this technique can be used in conjunction with projection filters, show the benefits of using this technique to provide a nearly discrete starting point for subsequent level-set optimization, and show that an additional hyperparameter can be introduced to control the overall material/void fraction. This method excels for problems where the electromagnetic figure-of-merit is majorly affected by the binarization requirement and situations where identifying suitable hyperparameter values becomes challenging with existing methods.