Thermoforming parts with micro-scale design features require use of thin polymer films. Low heat capacity and fragility of thin (\100 lm) polymer films requires new technical developments for precise heating and form pressure application. This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features. Replication of hollow parts with multiscale features is also possible. Outer dimension in macroscopic length scale and functional design features in microscopic length scale are combined with nanoscale surface structures in an affordable technology.
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