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OMRON developed a practical single pole double throw (SPDT)-structured RF-MEMS switch for 4G Front-Ends of next generation mobile handsets. This RF-MEMS switch has not only a very low insertion loss of less than 0.25dB and a high isolation of more than 30dB up to 3GHz but also high linearity and very low harmonic generation. The switch achieves small size by using Through Silicon Via (TSV) structure. And also we demonstrate 3V driving switch by integrating a charge pump IC.Index Terms -Electrostatic actuator, Charge pump IC, single pole double throw (SPDT), ohmic contacts, RF MEMS.

To realize a low-cost sensor and a sensor chip, we propose a localized surface plasmon resonance (LSPR) sensor in which nano-imprinting technology is applied to produce periodic arrangements of metallic nanostructures; we also verify its utility. LSPR can concentrate electric fields in the vicinity of nano-order metal structures. Accordingly, the sensing depth can be localized, resulting in noise reduction. Furthermore, nano-imprinting can be applied inexpensively and with high accuracy to fabricate nano-patterned sensor chips in large quantities. This work involves the design of an original nano-period structure and the application of nano-imprint technology to the fabrication of a sensor chip. The result is a proposal for a biosensor that allows fabrication with both higher throughput and lower cost.

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