High-order harmonic generation (HHG) is currently utilized for developing compact table-top radiation sources to provide highly coherent extreme ultraviolet (XUV) and soft X-ray pulses; however, the low repetition rate of fundamental lasers, which is typically in the multi-kHz range, restricts the area of application for such HHG-based radiation sources. Here, we demonstrate a novel method for realizing a MHz-repetition-rate coherent XUV light source by utilizing intracavity HHG in a mode-locked oscillator with an Yb:YAG thin disk laser medium and a 100-m-long ring cavity. We have successfully implemented HHG by introducing two different rare gases into two separate foci and picking up each HH beam. Owing to the two different HH beams generated from one cavity, this XUV light source will open a new route to performing a time-resolved measurement with an XUV-pump and XUV-probe scheme at a MHz-repetition rate with a femtosecond resolution.

Achievement of more than 100 mW of pure continuous-wave deep-ultraviolet radiation at 213 nm has been demonstrated in an efficient all-solid-state laser system that uses two Brewster-cut CsLiB6O10 (CLBO) crystals. The first crystal is used for 266-nm generation by external resonant doubling of 532-nm radiation from a frequency-doubled Nd:YVO4 laser. Subsequent sum-frequency mixing is performed in a second CLBO crystal placed in a diode-pumped Nd:YAG laser cavity to mix the single-pass 266-nm output with circulating 1064-nm light.

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