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Sm-based perovskite-type oxide (SmMeO 3 : Me = Cr, Mn, Fe, Co) thin-films could be synthesized by a wet-chemical method using an acetylacetone-Poly(Vinyl Pyrrolidone) (PVP) polymeric precursor method at 750˚C. The perovskitetype oxide thin-films were tried to apply an acetylene gas sensor based on AC impedance spectroscopy. Among the oxides tested, SmFeO 3 thin-film sensor showed good sensor responses in which the AC impedance at 20 kHz was depending on acetylene gas concentration between 2 ppm and 80 ppm at 400˚C.

A sensitive an impedancemetric acetylene (C2H2) gas sensor device could be fabricated by using perovskite-type SmFeO3 thin-film as a sensor material. The uniform SmFeO3 thin-films were prepared by spin-coating and focusing on the effects of polymer precursor solutions. The prepared precursors and thin-films were characterized by means of thermal analysis,　Fourier-transform infrared spectroscopy, ultraviolet–visible spectroscopy, X-ray diffraction analysis, scanning electron microscopy and X-ray photoelectron spectroscopy . It was found that particle growth and increase in homogeneity of the prepared thin-film could be accelerated by the addition of acetyl acetone (AcAc) as a coordination agent in the polymer precursor solution. Moreover, the highly crystallized thin-film-based sensor showed good response properties and stabilities to a low C2H2 concentration between 0.5 and 2.0 ppm.

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