We investigated a V-based electrode for the realization of low ohmic-contact resistivity in n-type AlGaN with a high AlN molar fraction characterized by the circular transmission line model. The contact resistivity of n-type Al0.62Ga0.38N prepared using the V/Al/Ni/Au electrode reached 1.13 × 10−6 Ω cm2. Using this electrode, we also demonstrated the fabrication of UV light-emitting diodes (LEDs) with an emission wavelength of approximately 300 nm. An operating voltage of LED prepared using a V/Al/Ni/Au electrode was 1.6 V lower at 100 mA current injection than that prepared using a Ti/Al/Ti/Au electrode, with a specific contact resistance of approximately 2.36 × 10−4 Ω cm2 for n-type Al0.62Ga0.38N.

High-performance AlGaN/AlGaN hetero-field-effect-transistor (HFET)-type photosensors with high photosensitivity were fabricated using p-type GaN comprising three-dimensional island crystals. The p-type GaN layers were grown on AlGaN layers at a high AlN molar fraction, and the area of p-type GaN comprising three-dimensional island crystals increased as the thickness of the p-type GaN film decreased, resulting in a reduced p-type GaN coverage ratio. The p-type GaN layers comprising three-dimensional island crystals and showing low coverage ratios were then used to fabricate HFET-type photosensors with high photosensitivity. A high light sensitivity of 1.5 × 104 A/W was obtained at a source–drain voltage (V SD) of 0.5 V for a photosensor with a p-type GaN thickness of 20 nm. Moreover, the dark current was suppressed to 10−10 A/mm and the photosensor achieved an extremely high photocurrent to dark current density ratio.