A full-field x-ray fluorescence imaging microscope using a Wolter mirror was constructed at Photon Factory BL3C2. White x rays from a bending magnet were used to excite x-ray fluorescence and to enhance the x-ray fluorescence intensity. A photon-counting method using a charge-coupled device was applied to obtain an x-ray fluorescence spectrum at the image plane. The spatial distributions of some specific atoms such as Fe and Zn were obtained from photon-counting calculations. An energy resolution of 220 eV at the Fe Kalpha line was obtained from the x-ray fluorescence spectrum by the photon-counting method. The newly developed three-dimensional element mappings of the specific atoms were accomplished by the photon-counting method and a reconstruction technique using computed tomography.

No abstract