Accurate stopping powers of polyimide have been determined for mean energies (E) in the range of 200 keV≤E≤3200 keV for 4He ions and 550 keV≤E≤1550 keV for 1H ions, using the transmission method for foils with areal densities of 30–225 μg/cm2. The overall uncertainties of ∼2% are mainly due to the foil thickness determination. The present data have been parametrized and compared to results obtained by previous authors in the upper energy range and to various parametrizations found in the literature. The best description of the data is given by Bragg’s rule calculations using parametrized elemental stopping powers that were derived from large data sets (deviations <2%). No support is found for the cores-and-bonds model showing deviations of 3%–5%, that may be due to the neglect of phase state effects.

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We demonstrate very accurate ion implant dose measurements using Rutherford backscattering spectrometry (RBS) traceable to a certified reference material from IRMM, Geel and the Bundesanstalt für Materialforschung (BAM), Berlin. The measurements have an absolute accuracy of better than 1.4% and a precision of better than 1.25%. The certified standard sample is compared directly with recent absolute determinations of the energy loss of He in Si, and also with a sample calibrated against the Harwell Bi standard. We determine the dose in a series of three In implants and six As implants of various doses and energies. Some of the samples were amorphized to eliminate channelling effects. A double detector geometry was used, giving pairs of spectra with a common incident charge but where the solid angle and the electronic gain were determined for each detector channel independently. The statistical uncertainty is reduced to <1%. The non-linear pile-up background is determined carefully. The errors are determined critically. The experiments were carried out at different dates and different places, so time and space reproducibility of the results is confirmed. The IBA DataFurnace is used for analysis of the certified standard reference material and compared with a transparent manual data reduction method: the use of this code for routine data analysis at the highest accuracy is validated.