We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5mm length of the ITO grating. By changing the lattice constant between 300 and 600nm, the OLED emission angle of enhanced light outcoupling is tailored from −24.25° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.

We fabricated organic light-emitting diodes with one-dimensional Bragg gratings as light extraction elements for substrate and waveguide modes. A Ta2O5 layer was introduced to obtain a high refractive index contrast to the subsequent anode layer. As anode we employed a highly conductive polymer. Laser interference lithography and physical plasma etching were used to pattern gratings into the Ta2O5 layer with a lattice constant of 370 nm and various grating depths. Mainly attributed to the outcoupling of the substrate modes, the structured devices exhibit a luminous flux which is up to four times higher compared to the unstructured reference devices.

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We present an experimental method for direct analysis of guided-mode resonances in photonic crystal slab structures using transmission measurements. By positioning the photonic crystal slab between orthogonally oriented polarization filters light transmission is suppressed except for the guided-mode resonances. Angle resolved transmission measurements with crossed polarizers are performed to obtain the band structure around the Gamma-point. Results are compared to mode simulations. Spatially resolved measurements in a confocal microscope setup are used for homogeneity characterizations. Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method.

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