It is well known that the production of semiconductors and chips with required parameters and properties is based on ion beam technology. However, the industrial use of ion beams still remains a problem because it requires a high rate and homogeneous treatment of the samples of complex configuration. Plasma technologies can make an efficient contribution to improving the tribological and corrosion characteristics of the most important workpieces for industrial machines. In the present report, consideration is given to the high voltage discharge of 3DII type at the pressure of 0.2–0.9 Pa with 10–30 kV pulse length of 0.25 ms and the repetition frequency of 30 Hz. We have defined such characteristics of the discharge as the volt-ampere curve at the mentioned pressure range, the range of discharge existence, and the thickness of the cathode sheath. The comparison of the profiles of implanted nitrogen ions at 10 kV pulse voltage obtained by the secondary ion mass spectroscopy CAMECA method with the results of the TRIM simulation, as well as the analysis of the voltage and current discharge pulses demonstrate that the ion flux incident on the workpiece is quasimonoenergetic and the angle of surface bombardment is normal.

An electron cyclotron resonance source with driven plasma rings for hydrogen isotope ion production is studied. Extracted currents of positive and negative ions depending on gas pressure, microwave power value and extraction voltage are obtained. The study shows that the negative ion yield is an order of magnitude higher than the yield of positive particles when a driven ring is in contact with the surface of the plasma electrode. The production of negative ions of deuterium, D-, is close to the production of negative ions of light hydrogen isotope, H-. The comparison of the experimental data with the calculated ones shows that the most probable process of the H- and D- ion formation in the electron cyclotron driven plasma is dissociative attachment of electrons to molecules in high Rydberg states. For hydrogen ions and ions of deuterium, the negative current at a microwave power of 200 W through a 3-mm aperture and 8 kV extraction voltage are 4.7 mA and 3.1 mA respectively.

The results of the three-dimensional (3D) self-consistent simulations of a 14 GHz minimum-B electron cyclotron resonance ion source plasma obtained upon 1.8×104 microwave periods by the particle-in-cell code are reported. The initial density of plasma contained in a chamber of 24 cm length and 6.3 cm in diameter is 0.6×1012 cm−3. We have used the explicit Boris-leap-frog scheme on the three-dimensional computer grid of 32×32×64 size. The results of the relativistic simulations show that the confined plasma has a complex spatial structure with a zone of periodic bounce oscillations as well as areas where banana trajectories are observed. The obtained electron energy distribution function makes it evident that in the electron cyclotron resonance minimum-B plasma there coexist three separable electron groups: a group of cold electrons with the energy up to 80 eV, a group of hot electrons whose energy extends to 80 keV, and a group of superhot electrons accelerated up to hundreds of kilo-electron volts. The space distributions of plasma ions have been found.

It is common knowledge that the electrostatic pit in a core plasma of electron cyclotron resonance sources exerts strict control over generation of ions in high charge states. This work is aimed at finding a dependence of the lifetime of ions on their charge states in the core region and to elaborate a numerical model of ion charge dispersion not only for the core plasmas but for extracted beams as well. The calculated data are in good agreement with the experimental results on charge distributions and magnitudes for currents of beams extracted from the 14 GHz DECRIS source.

Plasma of a 14 GHz minimum-B source which is based on the electron cyclotron resonance phenomenon, has been studied through a three-dimensional simulation code using a particle in cell technique. In the code, the fast Larmor rotations are calculated with a time step equal to 1/250 of the microwave field period. The space geometry of the electron and ion components as well as the ion spectra both in the core plasma and in the charged particle fluxes which reach the end walls, are determined. The low frequency oscillations of the electron component and the ion plasma component are discussed.