V. E. Minaichev scite author profile

The results of the experimental research of a small condensation cryopump cooled by a Stirling two-stage gas refrigerating machine are reported. Through the first stage the heat shield is cooled (T=100°K), through the second stage-so is the cryopanel (T=25°K). The cryopump provides the ultimate vacuum in the range of 10-7 Torr and continuous pumping of Ar and N2 in the medium vacuum range (10-2 Torr). The pumping speed versus time of the pump uninterrupted operation with the intense growth of the cryodeposit is given.

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V. E. Minaichev

A cryo-condensation booster pump

Small low-capacity expansion refrigerating machine

Measurement of a dielectric film thickness in the course of spraying

Condensation Cryopump with Independent Cryogenerator

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