We show that ellipsometric porosimetry can be used for the measurement of the pore size distribution in thin porous films deposited on top of any smooth solid substrate. In this method, in situ ellipsometry is used to determine the amount of adsorptive, which is adsorbed/condensed in the film. Changes in refractive index and film thickness are used to calculate the quantity of adsorptive present in the film. Room temperature porosimetry based on adsorption of vapor of organic solvents has been developed. In this article, a method of calculation of pore size distribution and results of measurements on mesoporous and microporous xerogel films is discussed. Examination of the validity of the Gurvitsch rule for various organic adsorptives (toluene, heptane, and carbon tetrachloride) is carried out to assess the reliability of measurements of pore size distributions by ellipsometric porosimetry.

The influence of electron energy quantization in a space-charge region on the accumulation capacitance of the InAs-based metal-oxide-semiconductor capacitors (MOSCAPs) has been investigated by modeling and comparison with the experimental data from Au/anodic layer(4-20 nm)/n-InAs(111)A MOSCAPs. The accumulation capacitance for MOSCAPs has been calculated by the solution of Poisson equation with different assumptions and the self-consistent solution of Schrödinger and Poisson equations with quantization taken into account. It was shown that the quantization during the MOSCAPs accumulation capacitance calculations should be taken into consideration for the correct interface states density determination by Terman method and the evaluation of gate dielectric thickness from capacitance-voltage measurements.

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Ellipsometric porosimetry allows measurement of the pore size distribution in a thin porous film deposited on top of any solid substrate. The most important concept of this technique is the use of in-situ ellipsometry to determine the amount of adsorbate adsorbed/condensed in the film. Changes in refractive index and film thickness are used for calculation of the amount of adsorbate. A room temperature porosimetry based on adsorption of vapours of some organic solvents has been developed. In this paper, a method of calculation of the pore size distribution and reliability of the ELP results is discussed and the validity of the Gurvitsch rule for organic adsorbates (toluene, heptane, CCl4) is examined. Porous silica films on top of Si wafers were used for this analysis.