Purpose This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications. Design/methodology/approach This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5 μm-thick polyimide film. Findings The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability. Originality/value The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.

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The effect of anionic substitution of halogen atoms on the spectral position and shape of the optical absorption edge and the dispersion of the refractive index of crystals of Cu 6 PS 5 I 1-x Cl x solid solutions are studied. The concentration dependences of the width of the optical pseudogap, refractive index, and lattice parameters are shown to be interrelated in these solid solution crystals.

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