The analytical formulas, describing spectral properties of sensor based on oblique incidence reflection interferometer in Kretschmann optical scheme. The sensor is designed for measuring the refractive index of analyte (liquid or gas) exploiting the effect of total internal reflection in multilayered metal-dielectric structure. The properties of comprised in the structure thin metal layer, that are necessary for optimization of sensor’s spectral profile, are defined. The spectral profile represents peaks with varying width. The oblique quaterwave dielectric layers are also used in the structure. The analytical properties of sensor depending on light polarization are given: resolution, sensitivity, contrast and figure of merit (FOM). It is shown in the paper, that sensor shows high grade parameters in both polarizations, but it is preferably to use S polarization to maximize FOM due to higher finesse in the sensor structure. The method of fabrication of such sensor structure with optical control during vacuum sputtering is proposed.

The paper presents simulation of the refractive index sensor of the analyzed liquid in the Kretschmann configuration based on an oblique reflective interferometer (RI) and its spectral properties for the first time. The principle of operation of this sensor is based on the effect of inverted surface plasmon resonance (ISPR). The sensitive structure is the metal-dielectric multilayer coating based on a nickel thin film in combination with non-quartewavelength dielectric layers. Modeling of the RI manufacturing process under oblique light incidence is described. Formulas for estimating the sensitivity and spectral width of the reflection maximum of ISPR are given, as well as the figure of merit. It is shown that due to the high quality factor, this type of sensor can have very large figure of merit (>10^3).

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