Due to recent advances in low-power VLSI design technology, it has become feasible to power portable or remote electronic devices by scavenging the ambient energy. The design, fabrication and measurement of a capacitive vibration-to-electricity energy converter are presented in this paper. With a device area constraint of 1 cm 2 and an auxiliary battery supply of 3.6 V, the device was designed to generate an output power of 31 μW with an output saturation voltage of 40 V. An external mass of 4 g was needed to adjust the device resonance to match the input vibration of 2.25 m s −2 at 120 Hz. Mechanical contact switches were integrated onto the device to provide accurate charge-discharge energy conversion timing. The device was fabricated in SOI (silicon-on-insulator) wafers by deep silicon etching technology. Parasitic capacitance was minimized by partial back side substrate removal. Resonant frequencies of the fabricated device with and without the external mass agreed with the expected values. Without the external mass, the measured ac output power was 1.2 μW with a load of 5 M at 1870 Hz. Detailed circuit modeling and ac output power measurement of the devices with the external mass attached are in progress.

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Wireless power transfer (WPT) through acoustic waves can achieve higher efficiencies than inductive coupling when the distance is above several times the transducer size. This paper demonstrates the use of ultrasonic phased arrays to focus power to receivers at arbitrary locations to increase the power transfer efficiency. Using a phased array consisting of 37 elements at a distance nearly 5 times the receiver transducer diameter, a factor of 2.6 increase in efficiency was achieved when compared to a case equivalent to a single large transducer with the same peak efficiency distance. The array has a total diameter of 7 cm, and transmits through air at 40 kHz to a 1.1-cm diameter receiver, achieving a peak overall efficiency of 4% at a distance of 5 cm. By adjusting the focal distance, the efficiency can also be maintained relatively constant at distances up to 9 cm. Numerical models were developed and shown to closely match the experimental energy transfer behavior; modeling results indicate that the efficiency can be further doubled by increasing the number of elements. For comparison, an inductive WPT system was also built with the diameters of the transmitting and receiving coils equivalent to the dimensions of the transmitting ultrasonic phased array and receiver transducer, and the acoustic WPT system achieved higher efficiencies than the inductive WPT system when the transmit-to-receive distance is above 5 cm. In addition, beam angle steering was demonstrated by using a simplified seven-element 1-D array, achieving power transfer less dependent on receiver placement.