Thin polyethyleneterephthalate (PET) layers with Fe nanoparticles (NPs) were synthesized by high-fluence ion implantation. Temperature dependence of conductance and magnetoresistance, were studied as a function of ion fluence. It is found that the implantation with fluences of about 1.0×10 17 cm -2 causes high enough concentration of metal inclusions to provide conditions for electrical percolation that leads to an insulator-to-metal transition (IMT) in charge carrier transport mechanisms. The magnetoresistance measurements indicate that the magnetic percolation takes place at metal concentrations (fluences) lower than those needed for the electrical percolation. For the samples on insulating side of the IMT, a non-monotonous dependence of resistance in an increasing external magnetic field is observed due to anisotropic magnetoresistive effect and charge carrier scattering on magnetic inclusions. For the samples implanted with fluences ≥ 1.0×10 17 cm -2 , the magnetoresistance becomes a monotonous decreasing function of the external magnetic field which is typical for ferromagnetic metals that indicates effective magnetic coupling of the iron inclusions.

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Morphology and electron-transport properties in the photoresist-silicon structures implanted by 60 keV antimony in the fluence range 1 × 10 15 ÷ 5 × 10 16 cm −2 with the ion current density 4 µA/cm 2 have been investigated. Microhardness increases with the increasing fluence. Non-monotonous dependence of microhardness on the depth in the implanted structures was observed. Transition from insulating to the metallic regime of conductivity was not observed.

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