A review of methods and instrumentation for the study of tribological and mechanical properties of the surface. It is established that the most common methods for studying these properties in the micro and nano-ranges are contact methods based on the interaction of the hard tip with the material under study. In scanning probe microscopy, a bimorph piezoceramic probe with a diamond tip is the main element of the measurement modules used for nanoindentation and sclerometry to comprehensively study the tribological and mechanical properties of the surface. The original design of the sensor allows to implement more than ten measuring techniques on one device. The operation of these devices in the semi-contact scanning probe-microscopic mode allows to obtain images of the surface relief and a map of the distribution of elastic properties. The indentation mode allows to measure hardness and modulus of elasticity, to estimate elastic recovery of material after indentation. The method allows to determine the abrasion resistance and hardness of the material, adhesion and thickness of thin coatings.