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Defects introduced into electroplated Cu films during room-temperature recrystallization probed by a monoenergetic positron beam J. Appl. Phys. 98, 043504 (2005); 10.1063/1.2009813 Studies of the driving force for room-temperature microstructure evolution in electroplated copper films Vacancy-type defects in electroplated Cu films probed by using a monoenergetic positron beam J. Appl. Phys. 95, 913 (2004); 10.1063/1.1635648Seed layer dependence of room-temperature recrystallization in electroplated copper films