The thermal reactions of Clz with the GaAs(lO0) surface were studied using XPS, LEED and thermal desorption spectroscopy. Chlorine uptake at 175 K is initially very rapid, but an extensive corrosion phase is not formed. Five thermd desorption features are seen, with cracking patterns corresponding to GaC1, As*, Gal%, C l a , and ASCL. The implications for the thermal etching of gallium arsenide are discussed.
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