A membrane-based coplanar-stripline (CPS) transmission-line platform has recently enabled implementation of diverse THz system-on-chip (TSoC) components. In this paper, we demonstrate an elliptic-function THz low-pass filter (TLPF) using cascaded λ/4 resonators between the right-angle bending of a CPS transmission line defined on a 1 μm-thin membrane. We investigated the effect of bending the CPS transmission line with different angles that introduces a frequency response similar to a simple LC low-pass filter (LPF) and facilitates the design of a desired roll-off performance using traditional methods. ANSYS HFSS was used to provide a full-wave analysis and characterize the effective parameters of the TLPF with a designed cutoff-frequency around 0.6 THz. Using 7 sections of right-angle CPS bending with total length 1.4 mm, we demonstrate experimentally an elliptic-function TLPF characterized by a low-ripple at passband, a roll-off transition with zero transmission near the cutoff frequency and a wide stopband with −60 dB rejection.

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Recently we demonstrated the fabrication and testing of a variety of RF-engineered passive transmission-line-based components designed for operation at terahertz frequencies and fabricated on thin (1 μm) silicon-nitride membranes. In this work we measure the transmission response of a coplanar-strip transmission line loaded with split-ring resonators up to 2.5 THz. We observe three dominate modes within the measured frequency range; the predicted LC resonator mode at 0.510 THz, a higher-order LC resonator mode at 1.03 THz, and a higher-order dipole mode at 1.85 THz. The LC resonator mode is investigated using a modified version of the standard lumped element model which incorporates the transmission line between adjacent meta-atoms using ABCD matrices.

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