The subwavelength confinement of light energy in the nanogaps formed between adjacent plasmonic nanostructures provides the foundational basis for nanophotonic applications. Within this realm, air-filled nanogaps are of central importance because they present a cavity where application-specific nanoscale objects can reside. When forming such configurations on substrate surfaces, there is an inherent difficulty in that the most technologically relevant nanogap widths require closely spaced nanostructures separated by distances that are inaccessible through standard electron-beam lithography techniques. Herein, we demonstrate an assembly route for the fabrication of aligned plasmonic gold trimers with air-filled vertical nanogaps having widths that are defined with spatial controls that exceed those of lithographic processes. The devised procedure uses a sacrificial oxide layer to define the nanogap, a glancing angle deposition to impose a directionality on trimer formation, and a sacrificial antimony layer whose sublimation regulates the gold assembly process. By further implementing a benchtop nanoimprint lithography process and a glancing angle ion milling procedure as additional controls over the assembly, it is possible to deterministically position trimers in periodic arrays and extend the assembly process to dimer formation. The optical response of the structures, which is characterized using polarization-dependent spectroscopy, surface-enhanced Raman scattering, and refractive index sensitivity measurements, shows properties that are consistent with simulation. This work, hence, forwards the wafer-based processing techniques needed to form air-filled nanogaps and place plasmonic energy at site-specific locations.

The advancement of nanoenabled wafer‐based devices requires the establishment of core competencies related to the deterministic positioning of nanometric building blocks over large areas. Within this realm, plasmonic single‐crystal gold nanotriangles represent one of the most attractive nanoscale components but where the formation of addressable arrays at scale has heretofore proven impracticable. Herein, a benchtop process is presented for the formation of large‐area periodic arrays of gold nanotriangles. The devised growth pathway sees the formation of an array of defect‐laden seeds using lithographic and vapor‐phase assembly processes followed by their placement in a growth solution promoting planar growth and threefold symmetric side‐faceting. The nanotriangles formed in this high‐yield synthesis distinguish themselves in that they are epitaxially aligned with the underlying substrate, grown to thicknesses that are not readily obtainable in colloidal syntheses, and present atomically flat pristine surfaces exhibiting gold atoms with a close‐packed structure. As such, they express crisp and unambiguous plasmonic modes and form photoactive surfaces with highly tunable and readily modeled plasmon resonances. The devised methods, hence, advance the integration of single‐crystal gold nanotriangles into device platforms and provide an overall fabrication strategy that is adaptable to other nanomaterials.

Bimetallic Janus nanostructures represent a highly functional class of nanomaterials due to important physicochemical properties stemming from the union of two chemically distinct metal segments where each maintains a partially exposed surface. Essential to their synthesis is the incorporation of a symmetry-breaking control that is able to induce the regioselective deposition of a secondary metal onto a preexisting nanostructure even though such depositions are, more often than not, in opposition to the innate tendencies of heterogeneous growth modes. Numerous symmetry-breaking controls have been forwarded but the ensuing Janus structure syntheses have not yet achieved anywhere near the same level of control over nanostructure size, shape, and composition as their core−shell and single-element counterparts. Herein, a collimated ion beam is demonstrated as a symmetry-breaking control that allows for the selective removal of a passivating oxide shell from one side of a metal nanostructure to create a configuration that is transformable into a substrate-bound Au−Ag Janus nanostructure. Two different modalities are demonstrated for achieving Janus structures where in one case the oxide dissolves in the growth solution while in the other it remains affixed to form a three-component system. The devised procedures distinguish themselves in their ability to realize complex Janus architectures arranged in periodic arrays where each structure has the same alignment relative to the underlying substrate. The work, hence, provides an avenue for forming precisely tailored Janus structures and, in a broader sense, advances the use of oxides as an effective means for directing nanometal syntheses.