This is a PDF file of an article that has undergone enhancements after acceptance, such as the addition of a cover page and metadata, and formatting for readability, but it is not yet the definitive version of record. This version will undergo additional copyediting, typesetting and review before it is published in its final form, but we are providing this version to give early visibility of the article. Please note that, during the production process, errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.

A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm-2 , the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. NR structures enhance the sensitivity of the sensor. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

No abstract

No abstract