In this paper, a fast auto-focus microscope system was developed based on the astigmatic method. A collimated infrared laser beam was employed in the infinite-corrected microscope optical axis by the beam splitter and reflected by the sample surface. By embedding an astigmatic lens in the system, the reflected laser beam has different focal lengths in the sagittal and tangential planes. As the microscope's relative distance varies, the reflected laser beam shape also varies and can be detected by an embedded four-quadrant photodiode, i.e., the focus error signal (FES) can be found. Then, a fast auto-focus system can be realized by converting the FES to the microscope's defocus distance. We designed an astigmatic auto-focus system for a 20× objective lens with a ±50 µm working range, and this system could also be used for 10× and 5× objectives with ±200 µm and ±800 µm working ranges, respectively.

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The conventional auto-focus and zoom image systems were made by a set of motor-moved lenses. Because of mechanical moving parts, it is not easy to miniaturize their sizes. In this paper, we propose a thin autofocus system using a large stroke MEMS (micro-electro-mechanical systems) deformable mirror which has the potential to downscale the size and to minimize chromatic aberration. The large stroke MEMS deformable mirror is made by a polyimide membrane that has a maximum 12 microm displacement over a 3 mm aperture. The module size is 5.4 mm thick in optical design layout and 6.7 mm after packaging. This autofocus system is designed with the f-number=4.13, on-axis MTF=0.28 at full frequency of 230 cycles/mm, and incident light within+/-26 degree. The position of clear image can vary from 4 cm to 50 cm achieved by controlling the surface curvature of the MEMS deformable mirror.

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