Terahertz metasurfaces have great applications for efficient terahertz modulation, but there are still problems in designing terahertz metadevices in terms of complexity and inefficiency. Herein, we demonstrate an inversely-designed terahertz metasurface with double electromagnetically induced transparency (EIT)-like windows by incorporating a particle swarm optimization (PSO) algorithm with the finite-difference time-domain method. We prepared and tested the metadevices, and the experimental terahertz signals are close to the designed results. By hybridizing amorphous germanium film with the inversely-designed metasurface, two EIT-like windows, including transmission and slow-light effect, exhibit ultrafast modulation behavior in 25 ps excited by a femtosecond laser. The modulation depths of transmission in two transparency windows are 74% and 65%, respectively. The numerical simulations also illustrate the ultrafast dynamic process and modulation mechanism, which match well with the experiment results. Our work thus offers opportunities for designing other objective functions of the terahertz metadevice.
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