A new high precision contact scanning probe able to measure miniature components on a micro/nano-coordinate measuring machine (CMM) is proposed. This contact probe is composed of a fiber stylus with a ball tip, a floating plate and focus sensors. The stylus is attached to a floating plate, which is connected to the probe housing via four elastic wires. When the probe tip is touched and then deflected by the workpiece, the wires experience elastic deformations and the four mirrors mounted on the plate will be displaced. These displacements can be detected by four corresponding laser focus probes. To calibrate this touch trigger probe, a double-trigger method is developed for a high-speed approach and a low-speed touch. Experimental results show that the probe has a symmetric contact property in the horizontal XY plane. The contact force is found to be about 109 µN. The standard deviation of the unidirectional touch is less than 10 nm and the pre-travel distance is around 10 nm with a standard deviation of less than 3 nm.

Ultraviolet (UV) luminescent materials hold great promise for applications across a wide number of fields, whether environmental, biological or medical. However, luminescent materials with the capability to continue emitting UV...

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Luminescent materials that emit in the narrowband ultraviolet-B (NB-UVB; 310–313 nm) spectral region have attracted considerable attention due to their unique spectral features, which endow them with great potential applications...