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In recent years, for expanding the productivity and improving the market competitiveness, some methods are carried out, which include new technology, new process, new materials and so on, to constantly improve the precision of geometric measurement in the manufacturing field. In addition to this, a large number of the advanced manufacturing equipment has also been used. In the case of rich field experience, this paper mainly introduces the application of laser tracker, laser interferometer, joint arm type coordinate measuring machine, three-dimensional contour optical scanning measuring instrument in robot, automobile fixture, ground penetrating radar, special-shaped parts scanning and so on.

As a non-contact measuring instrument, 3D surface profilometer has many advantages such as high precision, good repeatability and high visualization, and has become the mainstream measuring equipment in the field of micro and nano detection. Single cut line sample, multi cut line sample and step sample have important applications in micro/nano calibration field. In this paper, 3D surface profilometer is used to measure two kinds of samples. The results are compared with those obtained by National Institute of Metrology. The results show that the results are similar to those obtained by other measuring equipment, which proves the powerful function of 3D surface profilometer.

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