The microresonant pressure sensor with docks has a relatively high sensitivity. However, the sensitivity calculation of the microresonant pressure sensor is approximate and independent on the film pressure. Here, the dynamic equations of the microresonant beam with docks are deduced and its equations of the natural frequency are given. The relationship between microbeam stress and dock width of the sensor is determined. The sensitivity of the sensor to film pressure is investigated. The results show that the sensitivity of the microsensor to pressure changes with film pressure, and the sensitivity is large for relatively small film pressure. The system parameters such as length and thickness of the beam, length and thickness of the pressure film, and dock width have effects on the sensitivity of the microsensor to pressure. The film thickness has the most obvious effects on the sensitivity. These results are useful for the analysis and design of the operating behavior of the sensor.

The MMI optical power splitters which are based on the self-imaging effect (SIE) have been analyzed in the paper, and 1X4 MMI power splitter is designed. The designed device is simulated and optimized by Beamprop software, the simulation results are basically agreement with the designed effect, the excess loss induced by multimode interference is less than 0.04dB, uniformity is about 0.01dB.The low loss and fine uniformity MMI power splitter has been made by Lithium Niobate annealed proton exchange technology, and the experiment sample measurement results are achieved. Keywords: multimode interference (MMI), self-imaging effect (SIE), annealed proton exchange (APE) 1.Introduction In next WDM optical networks require wavelength routing with polarization insensitive devices which have large bandwidths, also small dimensions and improved fabrication tolerance are required in order to processing costs and facilitated large volume production and greater integration [1][2] . This paper shows the demonstration of Multimode Interference (MMI) power splitters with LiNbO 3 waveguide using the annealed proton exchange (APE) technology. The design and simulation results for 1X4 MMI power splitter are presented. Firstly the main parameters such as the center wavelength and the index difference have been confirmed according to APE technology. Secondly the theory of the MMI power splitters is discussed. And then the simulation and experiment results of 1X4 MMI splitter are presented.Passive integrated optical devices primarily split signals into two or more parts and route them to the desired directions. And LiNbO 3 has been the most popular material to make passive components, and the annealed proton exchange (APE) technology has been widely used to fabricate waveguide on the LiNbO 3 substrate. MMI devices are useful photonic components because they can reproduce images of an input beam at periodic intervals along the propagation direction due to interference of the waveguide modes. This self-imaging principle causes the input field to be reproduced as either single or multiple images at regular intervals along the length of the MMI device.MMI splitters have extremely promising characteristics. The splitting ratios can be accurately achieved, low losses have been achieved, and these values can be maintained fairly accurately over a wide range of operation wavelengths and operation temperatures. In addition for larger number of 1 Email：cueijianmin@bit.edu.cnThe project was supported by Open Fund

TOPS (Terrain Observation by Progressive Scans) mode can achieve large scene coverage through the beam-scan in a uniform-angular-rate form; when the scanning angle is large, the variation of azimuth theoretical resolution with the scanning angle cannot be ignored. Aiming at airborne SAR (Synthetic Aperture Radar) system, the Doppler characteristic of azimuthal echo of the TOPS mode with large scanning angle is analyzed, and a non-uniform-angular-rate beam-scan method is proposed. By adjusting the angular rate of the beam-scan in a real-time form, we can achieve a consistent azimuth theoretical resolution for the targets at different azimuth location. The simulation results show that the proposed method can alleviate the azimuth resolution inconsistency of about 0.4 m when the azimuth theoretical resolution is 5 m.