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Ferroelectricity in HfO2 thin films can be utilized for fast, power‐efficient, and highly scalable non‐volatile memories. However, the required wake‐up process for inducing ferroelectricity/ achieving higher polarization is one of the major hurdles that hinder HfO2‐based thin films from developing reliable electronic devices. The wake‐up effect is believed to originate from i) phase transformation from non‐ferroelectric to ferroelectric, ii) movement of defect entities (mainly oxygen vacancy defects) near the film‐electrode interface, and iii) heterogeneity of the electrode interfaces. In the present study, an experimental strategy is designed to overcome these sources of the wake‐up process. A multi‐step deposition and annealing process is carried out to induce wake‐up‐free ferroelectricity in Yttrium doped HfO2 (Y:HfO2) thin film directly grown on Si‐substrate. Furnace annealing is utilized instead of the standard rapid thermal annealing process to reduce the oxygen deficiencies and stimulate the direct growth of the polar Y:HfO2. The oxygen‐vacancy‐related defects are found to be the dominating source of wake‐up effect in Y‐doped HfO2 films. The step‐wise deposition and annealing in the oxygen atmosphere facilitate direct growth of the polar phase, reduce the oxygen vacancies, and induce wake‐up‐free ferroelectricity in Y:HfO2.

Low-temperature deposition of inorganic ferroelectric (FE) thin films is highly demanded for lowering the environmental impact through lesser energy consumption. Doped HfO2-based FE thin films commonly require high crystalline temperature (>450 °C) to exhibit ferroelectricity. Here, we report that the crystallization temperature of the metastable orthorhombic (O) phase in Hf0.5Zr0.5O2 thin films can be lowered to 350 °C via a deep ultraviolet (DUV) irradiation process carried out before rapid thermal annealing (RTA). The DUV irradiation initializes a nucleation process of the crystal growth through photochemical cleavage of organic residues, followed by the densification of metal oxide films, and the subsequent RTA at 350 °C crystallizes the Hf0.5Zr0.5O2 thin film with a higher O-phase fraction. The DUV-irradiated films annealed at 350 °C exhibited FE characteristics, whereas the non-irradiated films annealed above 450 °C become FE. Our study suggests that DUV irradiation can be successfully utilized to lower the crystallization temperature of HZO thin films and can lead to the realization of flexible FE random access memories.

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Electrocaloric effect (ECE) – the zero-emission energy-efficient process in which an applied electric field can reversibly change the entropy in a polar material, is promising for environment-friendly and compact applications...