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In general, it is defined "Chrome-Film Haze", as an invisible film reside on the chrome surface. This type of Haze defect can poise as a "silent killer" because it cannot be seen by naked eyes, nor can be easily detected by our inline Inspection tool. We hypothesize that this kind of haze will block its transmission at chromeside, thus causing its dosage trending on one direction & intrafield corners/centre CD drifting. This type of "haze", if not properly managed, especially on a "Dark-field Low-Transmission" Mask (i.e..Contact)... can cause "Contact Bridging" as a matter of time, resulting catastrophe yield loss on thousands of wafers, in a mass production FAB environment.So far, "Chrome-Film Haze" phenomenon is evident only on our Binary 193nm Reticles, with increased ArF exposures. Somehow, it does not occur on our 193nm PSM Mask yet. This could be attributed to the differences in the PSM & Binary Mask Cleaning material;-193nm PSM Reticle utilise 100% sulphate-free cleaning while 193nm Binary Mask is not. Thus, we can presumely expect that the sulphate "seeds" left on Chrome side, could have grown over increased ArF exposition, in a matter of time.Current FAB plant managed this kind of "Chrome-Film" Haze, by inserting a "APC Dosage control limit" & "Intrafield Corners/Centre CD" control so that it's dosage will not be allowed to trend unknowingly, causing corners-CD to drift away from its target. From our historical dosage trends, it became so apparent that we can almost predict when it'll hit its next APC dosage limit. Thus, we can draw a conservative wafer exposure count limit before it trigger its APC Dosage limit. In this way, we can be better prepared to plan and manage our production wafer input, in order to minimise the impact of reticle being sent for cleaning.

In this Letter, an actual Ah-throughput-based novel health indicator (HI) of battery module is proposed for its second life. The state of health (SOH) of a battery cell is generally evaluated by the cell capacity. However, it is difficult to define the SOH of a battery module since it consists of inconsistently aged cells. To represent module aging and the inconsistency, this Letter utilizes the actual Ah-throughput, which is the total amount of current suppliable to a load, as the module HI. Ahthroughput is affected by loss from cell balancing control, which is necessary for the safe and efficient operation of a battery system. The larger the inconsistency, the more balancing operation is needed. Therefore, the proposed HI can evaluate the module health reflecting the inconsistency from a balancing perspective. For the implementation of the HI, its derivation and calculation algorithm are presented. Finally, the effectiveness is verified by various case studies with an experimental setup consisting of a series-connected cells and an active cell balancer.

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