A CMOS-compatible 3-mask process for 2-axis selfaligned vertical comb-driven micromirror fabrication is described. Our 1024ptm diameter mirrors exhibit resonance at 2.8lkHz, 669Hz, and maximum scan angles of 220, 120 and 5.00, 4.50 for resonant and static voltage operation on inner and outer axes. Reflectance confocal images of USAF 1951 resolution target and epithelial breast tissue obtained at 3.Ofps with 0.49ptm, 4.18ptm lateral and axial resolution over 200x 125pim field of view indicate the potential of these devices for large field-ofview microendoscopes.

We report a novel light emitting nano-diode structure consisting of a single monolayer of CdSe nanocrystals deposited on a scanning probe tip for Near-field Scanning Optical Microscopy (NSOM). P-doped silicon which forms the probe body was utilized as an anode of the LED. A Langmuir -Blodgett (LB) trough was used to deposit on-probe a monolayer of nanocrystals (5-10 nm thickness), which were then examined with a SEM/TEM to show uniform deposition, and a fluorescent microscope to demonstrate light emitting properties. Both photoluminescent and electroluminescent emissions were observed from the fabricated probe with monolayer LED. Preliminary imaging and patterning using functional light emitting silicon probes were demonstrated in a standard NSOM setup. Resolutions of 50 nm and 400 nm were acquired for topographic and optical imaging, respectively.