This paper reviewed techniques of vibration sensors, studied structure and working principle of phase modulated optical fiber vibration sensor, and designed a new structure of non-contact optical vibration sensor. Use this structure, expect accuracy of 0.1um can be obtained in the range of 1mm. At the same time, this system is simple, anti-interference ability, high reliability and ease of practical.

The vibration measurement is one of the new application in the optical sensor. This paper studies a new non-contact optical vibration sensor, and implements the Optical fiber vibration sensor based on FPGA. The totally available measurement range arrived over 300um, and the accuracy of 0.1 um can be obtained . This fiber optic vibration sensor has a low cost, good reliability, and high accuracy measurements.