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F STRAT cange of wavelength in CSO (confocal scanning optical microscope) can be used as depth scanner without any mechanical movement so as to improve the quality of sectional images in CSO'T. The paper put forward such new CSO system. I .TNTRODUCI'ION I n conventional CS(V , the depth scanning is completed by mechanical movement of the plate(or substrate) on which the object is put. This causes some problems such as a set of driving system is needed for the depth scanning, and mechanical movement of the plate will lead to some errors to poor the quality of image. In order overcome these disadven tages, light source of changeble wavelength is used to focus rays at each different sections of object with helping of holographic lens when changing the wavelength of the sonrce. In next section, we give out such new kind of system. 2.NFW SYTE1In traditional CSO, some existed random errors can't assure the object to move vertically when scanning in depth. The mechanical random errors can be illustrated in fig.1. 0-8 194-075 7-7/9 2/$4.O0