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A 2×2 optical waveguide coupler at 850 nm based on the multimode interference (MMI) structure with the polysilsesquioxanes liquid series (PSQ-Ls) polymer material and the imprint technique is presented. The influence of the structural parameters, such as the single mode condition, the waveguide spacing of input/output ports, and the width and length of the multimode waveguide, on the optical splitting performance including the excess loss and the uniformity is simulated by the beam propagation method. By inserting a taper section of isosceles trapezoid between the single mode and multimode waveguides, the optimized structural parameters for low excess loss and high uniformity are obtained with the excess loss of -0.040 dB and the uniformity of -0.007 dB. The effect of the structure deviations induced during the imprint process on the optical splitting performance at different residual layer thicknesses is also investigated. The analysis results provide useful instructions for the waveguide device fabrication.

Abstract:The polymer waveguide optical biosensor based on the Mach-Zehnder interferometer (MZI) by using spectral splitting effect is investigated. The MZI based biosensor has two unequal width sensing arms. With the different mode dispersion responses of the two-arm waveguides to the cladding refractive index change, the spectral splitting effect of the output interference spectrum is obtained, inducing a very high sensitivity. The influence of the different mode dispersions between the two-arm waveguides on the spectral splitting characteristic is analyzed. By choosing different lengths of the two unequal width sensing arms, the initial dip wavelength of the interference spectrum and the spectral splitting range can be controlled flexibly. The polymer waveguide optical biosensor is designed, and its sensing property is analyzed. The results show that the sensitivity of the polymer waveguide optical biosensor by using spectral splitting effect is as high as 10 4 nm/RIU, with an improvement of 2-3 orders of magnitude compared with the slot waveguide based microring biosensor.