In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3.5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor.

In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detectors. The fully integrated sensor is formed by wafer bonding of two silicon substrates. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼750 ppm. The cross-sensitivity of the sensor to water vapor was studied both experimentally and numerically. No notable water interference was observed in the experimental characterizations. Numerical simulations showed that the transmission change induced by water vapor absorption is much smaller than the detection limit of the sensor. A qualitative analysis on the long term stability of the sensor revealed that the long term stability of the sensor is subject to the temperature fluctuations in the laboratory. The use of relatively cheap LED and photodiodes bare chips, together with the wafer-level fabrication process of the sensor provides the potential for a low cost, highly miniaturized NDIR CO2 sensor.

We report on efficient optical beam-steering using a hot-embossed reflective blazed grating in combination with liquid crystal. A numerical simulation of the electrical switching characteristics of the liquid crystal is performed and the results are used in an FDTD optical simulator to analyze the beam deflection. The corresponding experiment on the realized device is performed and is found to be in good agreement. Beam deflection angles of 4.4 • upon perpendicular incidence are found with low applied voltages of 3.4 V. By tilting the device with respect to the incoming optical beam it can be electronically switched such that the beam undergoes either total internal reflection or reflection with a tunable angle.

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In this work, we synthesized Cu‐doped ZnO nanowires through a vapor–liquid–solid process. We investigated their composition and photoluminescence properties; and we found the Cu‐doped ZnO nanowires have a c‐axis preferential growth direction, uniform Cu distribution and a characteristic spectrum. We further investigated their electrical property by fabricating a simple field effect transistor based on an individual C‐shaped Cu‐doped ZnO nanowire. The electrical studies reveal that the Cu‐doped ZnO nanowire has n‐type conductivity and ultralow electron mobility.