Pixelated filter arrays of Fabry-Perot (FP) cavities are widely integrated with photodetectors to achieve a WYSIWYG (“what you see is what you get”) on-chip spectral measurements. However, FP-filter-based spectral sensors typically have a trade-off between their spectral resolution and working bandwidth due to design limitations of conventional metal or dielectric multilayer microcavities. Here, we propose a new idea of integrated color filter arrays (CFAs) consisting of multilayer metal-dielectric-mirror FP microcavities that, enable a hyperspectral resolution over an extended visible bandwidth (∼300 nm). By introducing another two dielectric layers on the metallic film, the broadband reflectance of the FP-cavity mirror was greatly enhanced, accompanied by as-flat-as-possible reflection-phase dispersion. This resulted in balanced spectral resolution (∼10 nm) and spectral bandwidth from 450 nm to 750 nm. In the experiment, we used a one-step rapid manufacturing process by using grayscale e-beam lithography. A 16-channel (4 × 4) CFA was fabricated and demonstrated on-chip spectral imaging with a CMOS sensor and an impressive identification capability. Our results provide an attractive method for developing high-performance spectral sensors and have potential commercial applications by extending the utility of low-cost manufacturing process.

Computational hyperspectral cameras with broadband encoded filter arrays enable high precision spectrum reconstruction with only a few filters. However, these types of hyperspectral cameras have limited application, because it is difficult for conventional encoded filter arrays to balance among the spectrum regulation capacity, angle insensitivity, and processibility. This Letter presents a new, to the best of our knowledge, encoded filter composed of superposition Fabry–Perot resonance cavity (SFP) that can simultaneously take all three aspects into consideration. By learning the parameters of an SFP encoder and a neural network decoder in an end-to-end manner, a computational hyperspectral camera based on an SFP filter array presents up to 2.24 times higher spectral reconstruction accuracy, 10 times wider working angle, and can be produced with a low-cost manufacturing process.

Diffractive optical elements (DOEs) play an important role in modern optical applications such as spectral and imaging systems, but it is challenging to balance the diffraction efficiency with the working bandwidth. The core issue is controlling the broadband dispersion of all phase units to achieve achromatic 2 π -phase modulation in the broadband domain. Here, we demonstrate broadband DOEs utilizing multilayer subwavelength structures with different materials, making it possible to freely control the phase and phase dispersion of the structural units on a much larger scale than monolayer structures. The desired dispersion-control abilities arose due to a dispersion-cooperation mechanism and vertical mode-coupling effects between the top and bottom layers. An infrared design comprised of two vertically concatenated T i O 2 and Si nanoantennas separated by a S i O 2 dielectric spacer layer was demonstrated. It showed an average efficiency of over 70% in the three-octave bandwidth. This work shows enormous value for broadband optical systems with DOEs such as spectral imaging and augmented reality.