The Zn-doped Ba(Zr 0.2 Ti 0.8 )O 3 (BZT) films were prepared by sol-gel processing on Pt/Ti/SiO 2 /Si substrates. The crystal structures, surface morphology, dielectric properties of Zn-doped BZT films were investigated as a function of Zn content. It is found that the films belong to the perovskite structure. In addition, the dielectric constant decreases at first and then increases with the increasing of Zn content, but the dielectric loss decreases with the increasing of Zn content at room temperature. Finally, it also can be found that the Curie temperature of the Zn-doped BZT films is lower than that of the pure BZT films.