Studying the thermal deformation induced by ultrashort pulsed lasers is important for preventing thermal damage. This article presents a numerical method for studying thermal deformation in a 3-D microsphere exposed to ultrashort pulsed lasers. The method is obtained based on the parabolic two-step model and implicit finite-difference scheme on a staggered grid. In particular, a fourth-order compact scheme is developed for evaluating those stress derivatives in the dynamic equations of motion. The method allows us to avoid nonphysical oscillations in the solution. Its performance is demonstrated by a numerical example.

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