MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Resonator-integrated optical gyroscopes have advantages such as all-solid-state, on-chip integration, miniaturized structure, and high precision. However, many factors deteriorate the performance and push it far from the shot-noise limited theoretical sensitivity. This paper reviews the mechanisms of various noises and their corresponding suppression methods in resonator-integrated optical gyroscopes, including the backscattering, the back-reflection, the polarization error, the Kerr effect, and the laser frequency noise. Several main noise suppression methods are comprehensively expounded through inductive comparison and reasonable collation. The new noise suppression technology and digital signal processing system are also addressed.

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