The optical properties of PtO x thin films used for the optical recording layer of super resolution near-field structures (super-RENS) are studied at high temperatures. A series of PtO x thin films for various molar oxygen fraction x were prepared using the reactive magnetron sputtering technique. From the ellipsometric studies, it is found that the complex refractive index of PtO x changes monotonically from that of metallic Pt to that of dielectric PtO2 as the molar oxygen fraction increases. When temperature increases from 30 to 700°C, all PtO x is completely decomposed at 549°C and, for the samples with x larger than 1.3, the condensation of porous Pt films is completed at 700°C. The surface roughness of PtO x thin films with x larger than 1.3 increases markedly after temperature ramping and PtO x thin films evolve into Pt metal by passing through three steps of oxidization, decomposition and condensation.

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In order to solve the problems in the accuracy and adaptability of the existing methods for blade twist measurement, a high-precision and form-free metrological method of blade twist based on the parameter evaluation of twist angular position and twist angle is proposed in the study, and the theoretical model, the measurement principle and the key technologies of the method are discussed in detail. Three key issues of the twist metrology of a blade are solved based on technologies of calibration, a priori planning and geometric analysis: aeroengine axis matching, high-precision coordinate acquisition of the leading edge and the trailing edge, and extraction of twist angular position of the profile. The measurement path planning, sampling strategy optimization and high-precision coordinate collection are executed automatically without theoretical model data of the measured blade, thus the form-free and high-precision metrology of the blade twist is achieved. The research results show that the metrological method of blade twist presented in this study is effective, and that its measurement uncertainty is less than 0.01°. This method is form-free, efficient and accurate, and can solve the problems of high-precision measurement and evaluation for the twist of aeroengine blade primely.

The optical properties of AgO x thin films used as mask layers for a super-resolution near-field structure (super-RENS) were determined by in situ and ex situ ellipsometries and UV/VIS spectrometry. Irreversible changes of optical properties of AgO x thin films with temperature were also investigated.