A force sensor using strain gauges is widely used in many mechanical measuring systems. A method of measuring force and contact point using two gauges is available although it rather limited to extension of micro scale measurement. In order to overcome this limitation and to maximize a precision of the strain gauge sensor, sensor structure was optimized. Also, we used Kalman filtering for increasing an accuracy. It significantly increase the signal to noise ratio and stability of the sensor. This force sensor using strain gauges will be applied to diverse fields such as inspecting a micro system or manipulating small devices.

Physical size of semiconductor components has been reduced and device density has become increased especially during for last years. As a result of this the use of various high precision manipulatable robot systems becomes norm in the industry. Normally the high precision robot system consists of precision staging system, small scale end-effector system, and highly sensitive autonomous sensing system. One of the most popular micromanipulation tasks might be handling of micro-scale objects on a surface. Although many functional aspects and constraints should be considered when the system is constructed, a key concern for the system design is level of dexterity of the manipulator especially when size of the objects to be handled and spatial resolution of the manipulator become smaller than micron or nano scale. And stiction effect has appeared since a micro-contact mechanics phenomena affects more primarily than inertial force in the high precision robot system. Thus a theoretical study has to be developed on a micro-contact mechanics phenomena. In this paper, the organized system is equipped with an omnidirectional accessible manipulation system with a new visual feedback system. Thanks to the enhanced dexterity of the system, in this paper, microparticle stiction problems that could happen to most of small object handling also can be resolved.

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