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We have systematically investigated the complex impedance (CI) and complex capacitance (CC) spectra of MgO-based magnetic tunnel junctions (MTJs) due to successive annealing. The variation of the tunnel magnetoresistance (TMR) ratio due to annealing can be related to the change of interfacial trap states and textured MgO based on the analysis of CI spectra by an equivalent circuit model. The results of CC spectra are also consistent with the analysis of CI and observed TMR ratio variation. The CI and CC techniques are also powerful to characterize the oxide-based MTJs.Index Terms-Complex capacitance (CC), complex impedence (CI), MgO, equivalent circuit model (ECM), tunnel magnetoresistance (TMR).

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