Plasma columns sustained at high enough gas pressures undergo radial contraction as manifested by their glow not entirely filling the radial cross-section of the discharge tube. This phenomenon has been reported with direct current, radio frequency, and microwave discharges. However, its modeling is still incomplete, in particular for rf and microwave discharges, a situation attributed to a lack of experimental data. To fill this gap, we took advantage of the extreme flexibility in terms of field frequency, tube diameter and gas nature of surface-wave sustained discharges to achieve a parametric study of this phenomenon. Special attention was paid to filamentation, specific to rf and microwave discharges, which is the breaking of a single channel of plasma into two or more smaller filaments as a result of the skin effect. We used emission spectroscopy as the main diagnostic means. Electron density was obtained from Stark broadening of the Hβ line, while molecular-band spectra emitted by the OH radical and the N2+ molecule were employed to determine the discharge gas temperature, leading to its radial distribution upon performing Abel inversion. For a given tube radius, contraction is shown to increase with decreasing thermal conductivity of the discharge. As a result, He and N2 discharges are the least contracted, while contraction increases with increasing atomic mass of noble gases. Of all these discharges, the N2 discharge appears to be the closest to local thermodynamic equilibrium.

The modeling of microwave-sustained discharges at atmospheric pressure is much less advanced than at reduced pressure (<10 Torr) because of the greater complexity of the mechanisms involved. In particular, discharge contraction, a characteristic feature of high-pressure discharges, is not well understood. To describe adequately this phenomenon, one needs to consider that the charged-particle balance in atmospheric-pressure discharges relies on the kinetics of molecular ions, including their dissociation through electron impact. Nonuniform gas heating plays a key role in the radial distribution of the density of molecular ions. The onset of contraction is shown to depend only on radially nonuniform gas heating. The radial nonuniformity of the electric field intensity also plays an important role allowing one, for instance, to explain the lower degree of contraction observed in microwave discharges compared to dc discharges. We present a numerical fluid-plasma model that aims to bring into relief the main features of discharge contraction in rare gases. It calls for surface-wave discharges because of their wide range of operating conditions, enabling a closer check between theory and experiment.

A self-consistent two-dimensional fluid-plasma model coupled to Maxwell's equations is presented for argon discharges sustained at atmospheric pressure by the propagation of an electromagnetic surface wave. The numerical simulation provides the full axial and radial structure of the surface-wave plasma column and the distribution of the electromagnetic fields for given discharge operating conditions. To describe the contraction phenomenon, a characteristic feature of high-pressure discharges, we consider the kinetics of argon molecular ions in the charged-particle balance. An original feature of the model is to take into account the gas flow by solving self-consistently the mass, momentum, and energy balance equations for neutral particles. Accounting for the gas flow explains reported discrepancies between measured and calculated plasma parameters when assuming the local axial uniformity approximation. In contrast to the low-pressure case, the latter approximation is shown to be of limited validity at atmospheric pressure. The gas temperature is found to be a key parameter in modeling surface-wave discharges sustained at atmospheric pressure. It determines the radial and the axial structure of the plasma column. The calculated plasma parameters and wave propagation characteristics using the present two-dimensional fluid model are in good agreement with our set of experimental data.

Microwave plasmas sustained at atmospheric pressure, for instance by electromagnetic surface waves, can be efficiently used to abate greenhouse-effect gases such as perfluorinated compounds. As a working example, we study the destruction and removal efficiency (DRE) of SF6 at concentrations ranging from 0.1% to 2.4% of the total gas flow where N2, utilized as a purge gas, is the carrier gas. O2 is added to the mixture at a fixed ratio of 1.2–1.5 times the concentration of SF6 to ensure full oxidation of the SF6 fragments, providing thereby scrubbable by-products. Fourier-transform infrared spectroscopy has been utilized for identification of the by-products and quantification of the residual concentration of SF6. Optical emission spectroscopy was employed to determine the gas temperature of the nitrogen plasma. In terms of operating parameters, the DRE is found to increase with increasing microwave power and decrease with increasing gas flow rate and discharge tube radius. Increasing the microwave power, in the case of a surface-wave discharge, or decreasing the gas flow rate increases the residence time of the molecules to be processed, hence, the observed DRE increase. In contrast, increasing the tube radius or the gas-flow rate increases the degree of radial contraction of the discharge and, therefore, the plasma-free space close to the tube wall: this comparatively colder region favors the reformation of the fragmented SF6 molecules, and enlarging it lowers the destruction rate. DRE values higher than 95% have been achieved at a microwave power of 6 kW with 2.4% SF6 in N2 flow rates up to 30 standard l/min.