No abstract

A picosecond laser machining system is designed and constructed so that it is able to output 355, 532 and 1064 nm picosecond pulsed lasers. Through the axial aberration compensation design, the maximum distance of axial focus compensation reaches 0.4 mm with the focus spot size of 3 μm in diameter. The experimental studies of picosecond pulsed laser micro-machining are performed with this system. The results show that the picosecond laser micro-machining is able to reach the precision of microns with good quality.