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An enhancement of lithium ionic intercalation and conduction performance of lithiated-organo-iron-tantalum oxide (Li α FeTa x O y C z ) films has been accomplished by the addition of organo-lithium oxides (LiO y C z ) into organo-iron-tantalum oxide (FeTa x O y C z ) films using an atmospheric pressure plasma jet (APPJ) at various mixed concentrations of lithium tert-butoxide [(CH 3 ) 3 COLi] and tantalum ethoxide [Ta(OC 2 O 5 ) 5 ] precursors. The rapid deposition of Li α FeTa x O y C z films onto polished stainless steel substrates at short exposed durations of 38-41 s with an APPJ has been investigated. The APPJ-polymerized Li α FeTa x O y C z films have noticeable Li + ionic intercalation/deintercalation performance at 200 reversible cycles in a 1-M LiClO 4propylene carbonate electrolyte as analyzed by both potential sweep and potential step in situ Li + ionic intercalation. The Li + ion intercalated and deintercalated charges are significantly improved from 5.70 and 5.20 mC/cm 2 for FeTa x O y C z film to 8.11 and 7.51 mC/cm 2 for Li α FeTa x O y C z films, respectively. The Li + ionic conduction performance of FeTa x O y C z film is slightly enhanced from 107 × 10 −10 to 118 × 10 −10 S/cm for Li α FeTa x O y C z film, as verified by electrochemical impedance spectroscopy in the devices of polyethylene terephthalate (PET)/indium tin oxide (ITO)/NiO x /FeTa x O y C z /NiO x /ITO and PET/ITO/NiO x / Li α FeTa x O y C z /NiO x /ITO.