No abstract

To overcome the difficulties in the fabrication of the nanoimprint mold with lin ewidth smaller than 50nm, we deposited a-Si/SiNx multilayer films in plasma enhanced chemical vapor deposition system and then prepared the relieo-n anomold on the cleaved section of the multilayer films by selectively etching or reactive ion etching process. Due to the slow deposition rate, the thickness of the sublayer, and therefore the size of the strips and grooves can be controlle d on the nanometer scale by altering deposition time. The smallest width we get by now is the 20nm strips and 20nm pitches，which is better than that fabricated by electron beam lithography.

In this paper, we discuss using a UV fluorescence technique to target the aromatic component of the oil contamination. This examination method is can absorb certain wave length based on the aromatic hydrocarbon the energy of light (absorption) and launches the long ultraviolet wave length the energy of light (launch), this process is called the ultraviolet fluorescence process. This fluorimeter only can examine the hydrocarbon (and other materials), because these materials can launch the pair wave length which absorbs and launches chooses. The fluorescence method to the PAH examination is one kind of high sensitivity, the high selective special method, may in the water elimination air bubble and the solid suspension to examines the process the influence.