. An approach based on optical nano electro-mechanical-system (NEMS) switches is proposed in this paper to develop low-power logic circuits and processors. Based on the specific logic tasks expressed by sum-of-products (SOP) expressions, an array of switches can be appropriately arranged to implement various logic circuits. The logical output can be detected by translating the presence or absence of the light in the optical guided mode, which is controlled by the displacement of NEMS actuators under electrostatic forces. Therefore, to show the universality of the proposed method and its capability to extend processor circuits, the operation of a MUX (2:1) is analyzed. Furthermore, the presented switch’s functional characteristics and the logic circuits’ optical performance are obtained using the Finite Element Method (FEM) and Finite Difference Time Domain (FDTD) approaches. According to simulation results, the properties of the proposed switch, such as the operating voltage and the switching time, are 12 V and 2.6  μs, respectively. Consequently, the proposed fast and low-power actuator can be a promising choice for realizing low-power digital circuits, especially in the design of NEMS processors for low-power applications because of the significant reduction in its power consumption and immunity against electromagnetic radiation.