Silica coatings have been prepared by the spincoating technique with the 172 nm vacuum ultraviolet (VUV) ir radiation using a Xe 2 Þexcimer lamp. Perhydropolysilazane was used as a precursor. The chemical states, compo sition and optical transmittance of VUVirradiated films were investigated by Fourier transform infrared, Xray photoelectron, UVvisible absorption spectroscopies. The results showed that VUV irradiation was effective to remove hydrogen and nitrogen from the coating film and to incorporate oxygen to the film, so that the film transforms into silica. The effects of VUV treatment on the film were found to be dependent on oxygen concen tration in surrounding gas. It was suggested that the effect of oxidation reaction due to active oxygen species and/or ozone is larger than that of the cleavage of a chemical bonding by photon energy.

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