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The femtosecond laser writing with double-line technique was employed to fabricate buried channel waveguides with different widths in Yb:YVO4 crystal. Model profiles of the waveguides were captured using the endface coupling setup at the wavelength of 633 nm under TE and TM polarization. Furthermore, the confocal micro-Raman spectra in bulk and waveguide areas were studied at the wavelength of 633 nm. The enhanced Raman intensity were performed in waveguide areas.

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