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A novel two degree-of-freedom (DOF) ultrasonic planar motor based on traveling wave has been proposed in this paper. The stator is the key component of the planar motor. The proposed stator is in a bar type, consisting of three piezoelectric ceramic cylinders and a metal driving head. The effective elliptical motion of the driving head tip is formed by the second bending mode and the first longitude mode of the stator. The two working vibration modes are analyzed by FEM software, and the dimensions of the stator are optimized and determined via FEA. As a result of the optimization, frequencies of the two working modes are very close to 22 kHz. The major feature of the design is the multi-DOF motion achieved by a single stator.

In this paper, a multilayer conically squeezed GER (giant electrorheological fluid) damper combined the characteristics of shear mode and flow mode is studied. Based on the theory of fluid mechanics, this paper established a simplified mathematical model of damper and had experiments to verify it. The result shows a good agreement and an effective isolation ability. With the simple structure, this damper has tunable ability of damping and stiffness to adapt to different application requirements.