No abstract

By using the mobile property of silicone oil during deposition, characteristic wedge-shaped chromium (Cr) films have been successfully prepared on glass substrates by direct current magnetron sputtering, and their mechanical instability is investigated. The experiment shows that a disordered network composed of straight-sided buckles, which is due to relief of large compressive stress after deposition, can be widely observed in these films. The size of the buckles increases linearly with the film thickness. In the vicinity of spreading front of the silicone oil, parallel straight-sided buckles perpendicular to the front and bifurcation morphologies can be observed. The influence of the edge effect on the buckle morphologies is also discussed in this paper.

By using the mobile property of silicone oil, a wedged iron (Fe) film system, deposited on glass substrate, has been prepared by dc-magnetron sputtering technique. The wedged Fe film is quenched by the silicone oil during deposition, and therefore contains a very high compressive stress, which is relieved by formation of a large number of telephone cord buckles. Both the buckle width l and maximum buckle deflection δ increase linearly with the film thickness, but the ratio of δ to l (l/δ ) decreases steadily. The internal stress and adhesion energy are estimated in the frame of continuum elastic theory.